MF5000 Digital Mass Gas Flow Meter For Medical Oxygen Monitoring

Description MF5000 series mass flow meters

MF5000 series mass flow meters are specially designed for small pipe flow monitoring and control. The series can measure gas flow in a pipe diameter as small as 3 mm,but not over 19 mm. With the self-flow conditioning feature of the MEMS sensor package, the meters feature an extremely low pressure loss compared to the traditional by-pass thermal mass flow meters in this application scope. The accuracy of the meters are generally ±(1.5+0.2FS)% or better depending on the requests. The meters can work at an environment of -20 to 60 C and pressure up to 1.5 MPa. Applications include semiconductor gas process monitoring and control, hospital oxygen gas monitoring, etc.

Specification MF5000 series mass flow meters

Accuracy: ±(1.5+0.5FS)%

Environment Temperature: -20 ~ +60 oC

Humidity: < 95 %RH (No icing or condensation)

Flow channel :3 ~ 19 mm

Display: Flowrate and accumulated flow

Interface:4 ~ 20 mA; RS485; Pulse

Calibration:Air @ 20 oC, 101.325 kPa

Protection: IP40 (Without Ex proof model); IP66 (With Ex proof model)

Ex PrOof: Ex d IIC T4

Detailed Images MF5000 series mass flow meters

Mechanical Dimensions MF5000 series mass flow meters

Features of MF5000 series mass flow meters

Highly sensitive, measuring as low as 8 mm/sec, and as high as 65 m/sec with a single assembly
Directly sense mass flow using thermal mass flow principle
Proprietary MEMS sensor package design for better reliability
Standard 12 ~ 24 Vdc power supply
Low pressure loss forreducing energy cost
Industrial standard Modbus protocol for easy networking and remote control

Selection Guide of MF5000 series mass flow meters